Correlative Materials Characterization Workshop 2024

Title

Advanced Scale-Bridging Multi-Modal Analytics for Device and Material Optimization through Data Correlation and Machine Learning

Abstract

In the rapidly evolving fields such as electronics, battery technology and material science more in general, cutting-edge analytical approaches are essential to ensure device optimization, performance enhancement, and long-term reliability. Utilizing state-of-the-art tools such as x-ray microscopy (XRM), electron-ion microscopy (FIB-SEM), and Raman and infrared spectroscopies, we achieve a detailed correlative analysis. These methodologies are supported by nanoGPS technology, enabling precise multi-modal data correlation, which is critical in identifying imperfections and enhancing device performance. ncorporating advanced data analytics via machine learning algorithms within a proprietary platform, ‚XamFlow‘, adapted to our needs, we process and correlate extensive datasets, paving the way for predictive modeling in material and device optimization.

Title

At the Bridge between Biology and Material - Nanomaterial Application and Safety

Abstract

Nanomaterials are transforming industries, but their safety is critical. This talk explores trends in nanomaterial regulation, focusing on biological systems and the unique challenges in measurement. By highlighting recent advances in synthesis and functionalization, we’ll discuss how nanomaterials, like nanodiamonds, can be safely integrated into biomedical applications.

Bio

Scientific Career

• Various positions at Fraunhofer Institutes, Dresden, Germany
• Since 04/2015: Head of Department ‘Bio- and Nanotechnology’ and Director of Business Unit ‘Bio- and Medical Technology’
• 2012 - 2015: Division Director ‘Condition Monitoring & Diagnostics’
• 2010 - 2012: Business Unit Manager ‘Environmental Technology and Energy Technology, Life Science’
• 2007 - 2008: Scientific Staff and Deputy Head of Department ‘Optical Diagnosis’ and Head of Group ‘Nanotechnology and Optical Sensors’

• Since 2009: Lecturer at BIOTEC and Max-Bergmann-Center of Biomaterials
• 2013 - 2015: Head of Group ‘Biocompatibility of Electronics Packaging’ (Electronics Packaging Laboratory)
• 2010 - 2014: Head of Group ‘InnovaSens’ (Max-Bergmann-Center of Biomaterials)

Scientific Focus: BioNanotechnology, Nanoparticle, Sensor Technology, Medical Application, Solid State Physics

Title

Correlative scanning probe and luminescence microscopy to image structural obstacles for charge carriers

Abstract

With the miniaturization of (opto)electronic semiconductor devices, structural defects like grain or domain boundaries as well as strain-induced defects have an increased impact on the charge carrier transport. Here, electrical scanning probe microscopy allows capturing charge carrier accumulations, dopants and variations in the transport behavior. By complimenting SPM with luminescence detection, we are moreover able to visualize the impact of defects on ambipolar and excitonic transport.

Bio

Ilka Hermes studied chemistry at the Johannes Gutenberg University in Mainz. For her dissertation, she joined the Max Planck Institute for Polymer Research, where she used electrical and electromechanical SPM in combination with luminescence microscopy to study the impact of structural interfaces on charge carriers in perovskite solar cells. After three years in industry, Ilka started a junior research group for correlative SPM at the Leibniz Institute of Polymer Research in Dresden in 2022.

Title

High-Resolution Imaging of Transient RNA Polymerase II Biomolecular Condensates

Abstract

Biomolecular condensates, which assemble in cells to regulate key biological processes, are challenging to study due to their inherently dynamic nature. In this talk, we will present our integrative multi-scale approach, which integrates light microscopy, electron cryomicroscopy, cryotomography, and coarse-grained simulations. Together, these methods reveal new insights into the molecular organization and biogenesis of a model RNA polymerase II condensate, shedding light on its structural complexity.

Bio

Richard Stefl is a structural biologist at the Central European Institute of Technology, specializing in RNA-protein interactions and biomolecular condensates. His research integrates advanced imaging techniques like electron cryomicroscopy and nuclear magnetic resonance spectroscopy to uncover the molecular architecture of key biological systems.

Title

Multimode Fiber-Based Holographic Endomicroscopy: A Hair-Thin Path to Deep Brain Imaging in Animal Models

Abstract

We develop new endoscopes which are as narrow as human hair and provide extremely detailed observations anywhere in the living brain. Nowadays, they can routinely achieve monitoring of individual cells, resolve their connectivity and even record their activity within a neuronal circuit.

Bio

Hana Uhlířová is a senior scientist in the Complex Photonics group at ISI. She has a background in engineering and optics, with a strong focus on applying optical imaging technology to biological research. She has been interested in studying brain function, particularly the communication networks between different cell types and blood vessels involved in the brain's response to stimuli, known as the hemodynamic response. Currently, she is focused on using holographic endoscopes to achieve high-resolution imaging of neuronal circuits deep within the brain.

Title

Synchronized multi-channel multi-technique characterization in SEM and STEM

Abstract

A very wide range of material characterization techniques are used in Scanning Electron Microscopy (SEM) and Scanning Transmission Electron Microscopy (STEM). Standard microscopes generally provide detectors for the common imaging techniques, such as Secondary Electron (SE) detectors, Back-Scattered Electrons (BSE), Bright Field (BF) or High-Angle Angular Dark Field (HAADF). Additional characterization techniques are generally provided by third-party add-on systems, such as Energy Dispersive X-ray spectroscopy (EDS), Electron Beam Induced Current (EBIC), Cathodo-Luminescence (CL) and 4D STEM systems. Whilst add-on systems generally include synchronized characterization with standard detectors, synchronized imaging of all equipment required for correlative characterization remains challenging. We present here how advanced scan controllers can be employed to acquire multiple signals simultaneously, and, crucially, to synchronize multiple systems over digital trigger and synchronization signals.

Bio

Dr René Hammer graduated from Martin-Luther-University Halle-Wittenberg with a Physics diploma in 2007, and then continued in the Surface Science group as a PhD student and a Post Doc researcher to investigate structural and electronic structure of thin organic films on noble-metal single-crystals, which included low-temperature scanning-tunneling microscopy and spectroscopy. Dr. René Hammer joined point electronic GmbH in 2016, where he is currently a scientist and Product Manager for Electrical Analysis systems in SEM and TEM, focusing on instrument development and application science in a wide range of fields and industries, including semiconductor, energy and novel nano-devices.

Title

Observing while it happens: operando electron microscopy of non-equilibrium dynamics

Abstract

The relatively large chamber size of SEMs and the available space around the sample provide unique opportunities for combining complementary techniques for the simultaneous detection of diverse signals. Following the pioneering work of Gerry Danilatos [1], our group is developing environmental SEM for the study of gas phase and temperature induced processes such as material growth and decomposition or phase boundary dynamics and the emergence of catalytic function. Examples are used to highlight the importance of studying non-equilibrium states of matter.

[1] G.D. Danilatos “Foundations of Environmental Scanning Electron Microscopy”, Advances in Electronics and Electron Physics, Vol. 71, 1988, pp 109-250

Bio

Marc Willinger studied physics at the Technical University (TU) of Vienna and conducted his PhD studies at the Fritz Haber Institute (FHI) of the Max Planck Society. After a post-doc at the University of Aveiro in Portugal, he returned to the FHI as group leader for electron microscopy. There he started to develop and implement tools for multiscale operando electron microscopy. In 2018, he accepted a position as technical director at ScopeM, ETH Zurich. Since 2022 he is full professor at the TU Munich. He is interested in non-equilibrium states of matter, synergistic dynamics, and emergence of function.

Title

Complex materials analysis in high-volume semiconductor manufacturing - case studies

Abstract

Technology development and high-volume manufacturing of semiconductor devices requires complex materials and failure analysis workflows to enable fast yield learning and troubleshooting. The combination of several lab-based analytical techniques with in-fab metrology techniques provides a powerful suite of tools for solving complex problems. The examples showcase these capabilities at GlobalFoundries.

Bio

Andreas Meyer studied Applied Physics at the University of Applied Sciences in Zwickau, Germany, where he received his first degree. He went on to study Instrumental Analytical Sciences at the Robert Gordon University in Aberdeen/Scotland receiving a Master of Science degree. In 2000 he joined the Analytical Labs department of AMDs Fab30 in Dresden, Germany. He started his career as Scanning Electron Microscopy engineer working on process development and failure analysis topics of Cu interconnects. During this time he worked on his PhD in the field of electromigration in Cu interconnect, which he received from Brandenburg University of Technology in Cottbus, Germany. Andreas Meyer is currently managing the Fab1 Analytical Labs department as site lead within the Global Analytical Labs organization of GlobalFoundries.

Title

Next-Gen Batteries: understanding storage mechanisms and degradation phenomena

Abstract

Solid-state batteries are expected to became a safe and high energy alternative to todays Lithium-Ion-Batteries. However, major challenges evolving around material compatibility, mechanical stress and interface instability between solid electrolyte and active materials need to be solved. Correlative characterization is required in order to improve the understanding on mechanisms of storage and degradation. Major research questions and preliminary structure/property correlations will be addressed by providing insights into current research results on solid state battery research.

Bio

Holger Althues studied chemical engineering and received his doctoral degree in inorganic chemistry at the University of Technology Dresden in 2007. Since then he is working at the Fraunhofer Institute for Material and Beam Technology in Dresden, Germany. 2008 he became a team manager for the chemical surface technology group and his team was transferred into a division in 2015. In his position as division manager he administrates various projects in the area of film deposition techniques, electrode processing and future generation batteries